Fluid Conveyance

Fluid conveyance products support controlled distribution of specialty gases to process tools.

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Ultra-High Purity Check Valves

Backflow protection in semiconductor valve manifold boxes must preserve gas purity without consuming valuable panel space, and Parker's F9 Series UHP stainless steel check valves deliver compact, high-integrity reverse-flow prevention. Their small footprint and high flow capacity help protect upstream components, maintain process-gas cleanliness, and support efficient VMB assembly design for reliable wafer process operation in demanding cleanroom manufacturing environments with critical uptime requirements. View Product

Ultra-High Purity Bulk Diaphragm Valves

Parker's BDV Series ultra-high purity bulk diaphragm valves provide compact, high-flow isolation for valve manifold box distribution lines in semiconductor cleanroom and wafer process systems. Positive diaphragm retraction supports reliable opening and clean shutoff, while the BDV-P operator configuration adds service-oriented control features. This combination helps improve gas distribution efficiency, system serviceability, uptime, and dependable process gas control for critical high-purity semiconductor manufacturing applications. View Product

Ultra-High Purity Metal Gasket Face Seal Fittings

Leak-tight, removable gas line connections are critical in semiconductor valve manifold boxes, and Parker's VacuSeal ultra-high purity metal gasket face seal fittings provide high-integrity metal-to-metal sealing. Available in sizes up to one inch, these valves support high-vacuum and high-pressure service while limiting outgassing and potential leak paths. Their removable design simplifies VMB assembly and maintenance while preserving semiconductor gas purity. View Product

Ultra-High Purity Stainless Steel Diaphragm Valves

When semiconductor valve manifold boxes require clean, space-efficient low-flow gas isolation, Parker's 930 Series stainless steel diaphragm valves deliver dependable UHP process gas control. For VMB branch lines, purge lines, and tool gas routing, these valves offer manual and pneumatic configurations, low-particle operation, strong leak integrity, and compact flow paths. These features help preserve gas cleanliness, save panel space, simplify manifold layout, and support reliable operation. View Product

Ultra-High Purity Single Stage Pressure Reducing Regulators

For valve manifold box applications in semiconductor cleanroom and wafer process systems, Parker's FR1000 Series ultra-high purity single-stage pressure reducing regulators provide stable, high-integrity process gas control. With inlet pressure capability up to 3500 psig, low-to-intermediate flow regulation, Hastelloy C-22® diaphragm construction, integrated filtration, and metal-to-metal diaphragm sealing, the FR1000 supports clean gas delivery, reduced leak risk, long service life, and repeatable wafer process performance. View Product