Utility Level
Reliable filtration, drying and fluid handling technologies support dependable plant utilities and process services.
Clean Dry Air (CDA)
Supply clean, dry compressed air for instruments, actuators
and process equipment. Gas Cabinets Provide controlled, enclosed
delivery of specialty gases
to semiconductor
manufacturing tools. Ultra Pure Water (UPW) Deliver ultra pure water for
rinsing, cleaning and
contamination-sensitive
semiconductor processes. Refrigeration Air Dryers Remove moisture from
compressed air to protect
equipment and improve
process reliability.