Cleanrooms & Wafer Process Tools
High-performance components help control contamination, motion and fluids in precision semiconductor manufacturing environments.
Wet Benches
Support controlled chemical handling, rinsing and cleaning
in semiconductor wet
processing. Electrical Cabinets &
Compressed Air Dryers Protect control systems
while delivering clean, dry air
for pneumatic equipment. Wafer Process Tools Enable precise motion, fluid control
and contamination management for
lithography, etching, ion implantation,
deposition and chemical mechanical
planarization (CMP).