Motion & Control

Motion and control technologies help regulate fluid delivery, handling and process repeatability.

Contact Us

Linear Motors

Parker's linear motor technology delivers fast, precise, and low-maintenance motion for semiconductor wet bench equipment used in cleanroom wafer processing. With zero backlash, high acceleration, and long-travel capability, it enables smooth wafer handling, transfer, and positioning in space-constrained process tools. Direct-drive operation reduces mechanical complexity, wear points, and service needs, helping OEMs improve reliability, uptime, and process consistency in demanding wet bench applications. View Product

Frameless Servo Motors

Parker's frameless servo motors help wet bench equipment builders create compact, high-performance motion systems for semiconductor wafer processing. By integrating directly into the machine axis, they reduce mechanical complexity while delivering strong power density, smooth low-speed control, and flexible configuration options. This supports precise wafer handling, lift, transfer, and positioning in cleanroom chemical process environments where space efficiency, reliability, and process consistency are critical. View Product

Servo Drives

Fast, precise motion control is critical to wet bench equipment in semiconductor wafer processing, and Parker's Servo Drives provide responsive performance for automated chemical handling, wafer transfer, lift, and positioning operations. Real-time connectivity options, including EtherCAT, PROFINET, and EtherNet/IP, support efficient integration with tool control architectures. Compact single- and multi-axis designs reduce cabinet space and wiring, while auto-tuning, removable SD card functionality, and integrated Safe Torque Off simplify commissioning, maintenance, and machine safety. View Product

Linear Positioners

Parker's linear positioning technologies support wet bench equipment used in semiconductor cleanroom wafer processing with high repeatability, excellent straightness and flatness, and compact mechanical designs. Engineered for precise wafer handling, alignment, transfer, and process motion, Parker stages help OEMs achieve reliable performance in chemically demanding environments where accuracy, stability, clean operation, and space-efficient integration are essential. View Product

Motion Controllers

Reliable multi-axis coordination is essential for wafer process tool automation, and Parker's Motion Controllers provide deterministic control for advanced semiconductor machine tools. Smooth motion coordination helps reduce system complexity and improve equipment performance, while standard communications, powerful programming tools, intuitive setup, diagnostics, and visualization simplify integration and speed commissioning. These capabilities support precision, scalability, uptime, and dependable operation in demanding wafer processing environments. View Product

Brushless Servo Motors

Parker's Brushless Servo Motors provide precise, reliable motion for semiconductor wet bench equipment in cleanroom wafer processing environments. Designed for high responsiveness, smooth speed control, and accurate positioning, they support wafer handling, lift, transfer, and automated process motions where repeatability and uptime are critical. Their efficient, low-maintenance brushless design helps reduce wear-related service needs while enabling dependable performance, compact integration, and consistent operation in advanced wet bench applications. View Product