Motion & Control

Motion and control technologies enable precise positioning, flow regulation and repeatable process performance.

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Linear Motors

For wafer processing, Parker linear motors provide high-speed, high-acceleration motion with exceptional responsiveness and stiffness. Their direct-drive design eliminates backlash and reduces mechanical complexity, enabling precise, repeatable positioning with minimal maintenance in advanced semiconductor manufacturing environments. View Product

Motion Controllers

Parker’s Motion Controllers provide precise, scalable control for semiconductor lithography machines operating in cleanroom manufacturing environments. By integrating machine logic, coordinated motion, and signal handling into a compact platform, they help OEMs simplify tool architecture and improve synchronization across high-precision positioning axes. Real-time EtherCAT performance, CODESYS programming, IEC 61131-3 and PLCopen Motion support, OPC UA connectivity, fan-less DIN rail design, and fieldbus flexibility enable reliable, clean, and adaptable lithography tool control. View Product

Linear Positioners

Parker's Linear Positioners provide precise, repeatable linear motion for semiconductor lithography machines, where accurate positioning, smooth travel, and uptime are critical to patterning performance. Designed for high-precision automation, they help support wafer handling, alignment, focusing, and process module positioning with stable motion and reliable operation. When integrated with Parker servo motors, drives, and motion controllers, they enable coordinated axis control, compact machine architecture, reduced vibration, and dependable performance in demanding cleanroom manufacturing environments. View Product

AC Variable Frequency Drives

Parker's AC Variable Frequency Drives provide efficient, reliable motor control for semiconductor lithography machines, where stable auxiliary motion, airflow, vacuum, cooling, and utility systems support precision patterning and uptime. By delivering adjustable speed control for pumps, fans, compressors, and other motor-driven equipment, they help optimize energy use, reduce mechanical stress, and improve system responsiveness. Their flexible control capabilities support dependable operation, efficient machine architecture, and consistent performance in cleanroom manufacturing environments. View Product

Positioning Stages & Tables

Parker's linear positioning technologies support semiconductor wafer process tool equipment with precise, repeatable motion in cleanroom environments. Engineered for high repeatability, excellent straightness and flatness, and compact integration, Parker stages enable accurate wafer alignment, inspection, metrology, and process control. Their stable mechanical performance and clean-operation design help OEMs improve tool reliability, process consistency, and positioning accuracy in demanding semiconductor manufacturing applications. View Product

Brushless Servo Motors

Parker's Brushless Servo Motors provide compact, precise motion control for semiconductor cleanroom and wafer process automation. Delivering smooth, dynamic motion with fast response, they support speed, accuracy, and repeatability in high-performance equipment. Built for precision and efficient integration, Parker's servo motors help improve positioning accuracy, system responsiveness, and reliable operation in electrical cabinet and compressed air equipment requiring consistent performance and precise control. View Product

Servo Drives

Fast, precise motion control is critical to wafer process tool automation, and Parker's Servo Drives provide responsive performance for high-end semiconductor machine tools. Real-time connectivity options, including EtherCAT, PROFINET, and EtherNet/IP, support efficient control and integration. Compact single- and multi-axis designs reduce cabinet space and wiring, while auto-tuning, removable SD card functionality, and integrated Safe Torque Off simplify setup, service, and protection. View Product

Frameless Servo Motors

Parker's Frameless Servo Motors enable compact, high-performance motion for semiconductor wafer process tool equipment where precision, cleanliness, and space efficiency are critical. Integrated directly into the machine structure, they eliminate couplings, belts, and housings to reduce mechanical complexity, backlash, and particle-generating wear points. Their high torque density, smooth motion, and precise control support accurate wafer handling, alignment, inspection, and process stability in demanding cleanroom applications. View Product