Fluid Conveyance

Fluid conveyance products support precise delivery of gases, chemicals, coolants and process fluids.

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Push-to-Connect Fittings

Parker's LIQUIfit Push-to-Connect Fittings provide clean, reliable liquid connections for semiconductor lithography machines, supporting cooling, humidification, and auxiliary fluid circuits where leak-tight performance, fast assembly, and contamination control are critical. Their push-to-connect design helps simplify installation and maintenance in space-constrained tool layouts, while durable, lightweight construction supports dependable operation. By enabling efficient routing and secure connections, LIQUIfit fittings help OEMs improve serviceability, reduce assembly time, and maintain stable lithography machine performance. View Product

Ultra-High Purity Diaphragm Valves

Clean, space-efficient process gas isolation is essential in wafer process tool applications, and Parker's 930 Series ultra-high purity stainless steel diaphragm valves provide dependable low-flow, low-pressure control for tool hook-ups and UHP gas systems. Manual and pneumatic configurations, low-particle operation, strong leak integrity, and compact flow paths help route and isolate process gases while preserving cleanliness, conserving panel space, and supporting dependable wafer processing performance. View Product

Bulk Gas & Vacuum Delivery Units

Parker’s Bulk Gas & Vacuum Delivery Unit supports stable gas and vacuum management in semiconductor lithography machines, where pressure consistency, thermal stability, and contamination control are critical to precision patterning and uptime. The unit integrates a heat exchanger to thermally stabilize incoming pressurized gas, a piloted regulator to maintain constant gas pressure, and filtration with gas distribution manifold functionality. On the vacuum side, a piloted regulator helps ensure consistent, reliable vacuum performance. Integrated pressure monitoring provides feedback on input and output gas pressure and vacuum levels, supporting process stability, diagnostics, and dependable lithography tool operation. View Product

Ultra-High Purity Process Gas Boxes

Parker Veriflo's Ultra High Purity (UHP) process gas boxes support clean, stable gas delivery in semiconductor lithography machines, where pressure consistency, contamination control, and uptime are critical to precision patterning. The gas box regulates incoming gas supply to the desired set pressure and incorporates a spare output and sample port controlled by Veriflo valves. An integrated reservoir helps maintain constant pressure when main outputs are opened, supporting stable tool operation. Output valves are managed through an integrated control box with status LEDs and diagnostic connections, enabling reliable monitoring, troubleshooting, and lithography machine performance. View Product

Ultra-High Purity High-Flow Pressure Regulators

Wafer process tool applications with higher gas demand require stable UHP pressure control, and Parker's FR1300 Series ultra-high purity high-flow pressure regulators deliver dependable regulation for distribution and point-of-use bulk or specialty-gas service. Positioned at the tool hook-up or equipment interface, these regulators help maintain stable pressure as process demand changes, supporting reliable gas delivery where more flow is required than miniature gas-stick regulators can provide. View Product

Ultra-High Purity High-Flow Diaphragm Valves

Higher-flow gas control in semiconductor lithography machines requires clean, dependable isolation to support precise patterning, contamination control, and uptime. Parker’s 955 Series ultra-high purity high-flow diaphragm valves provide reliable shutoff at lithography tool hook-ups and process-equipment interfaces. The stainless steel diaphragm-valve platform supports strong leak integrity and clean gas delivery where greater flow capacity is needed, helping maintain process stability, cleanliness, and equipment performance. View Product

Push-In Fittings

Clean, reliable connections are essential in semiconductor cleanrooms and wafer process tools, where contamination control and uptime are critical. Parker’s Cleanfit Push-In Fittings simplify installation while helping maintain system cleanliness. Manufactured in accordance with ASTM G93 standards and hermetically sealed until use, they support critical applications. Their compact, full-flow design, push-in technology, and bio-based polymer construction improve efficiency, safety, sustainability, and operational reliability. View Product

Ultra-High Purity Miniature Regulators

Precise point-of-use gas control is critical in semiconductor lithography machines, where stable pressure, contamination control, and uptime support accurate patterning performance. Parker’s SQ2Micro Series ultra-high purity miniature regulators deliver stable pressure regulation in a compact tied-diaphragm design. Their small footprint, low internal volume, and UHP construction make them well suited for lithography gas sticks and process modules, supporting rapid response, efficient purging, space savings, and repeatable lithography performance. View Product

Ultra-High Purity Surface-Mount Regulators

Dense wafer process tool gas systems require compact, precise pressure control, and Parker's SMSQ2Micro Series ultra-high purity surface-mount regulators deliver tied-diaphragm regulation close to the process. Designed for modular surface-mount gas systems, they help reduce tubing, internal volume, and potential leak points while supporting clean UHP gas delivery. They are well suited for dense gas sticks in deposition, etch, and other wafer-processing equipment. View Product

High Purity PFA Tubing

High-purity media transfer depends on tubing that resists contamination, leaching, and outgassing in harsh semiconductor environments. Parker's High Purity PFA Tubing withstands high temperatures, aggressive chemicals, and corrosive fluids while remaining odorless, tasteless, non-leaching, and non-absorptive. With water absorption below 0.03%, it helps preserve media purity and prevent interaction between the fluid and tubing wall. View Product

Quick Couplings

Water processing tools in semiconductor cleanroom and wafer processing environments require secure, low-contamination fluid connections, and Parker's NSS Series Quick Couplings provide compact, non-spill stainless steel performance for critical process applications. Designed to minimize fluid loss and air inclusion, they deliver high flow with low pressure drop, while guided alignment, push-to-connect operation, and corrosion-resistant materials simplify integration in confined spaces and support reliable tool operation. View Product

Ultra-High Purity Pressure Regulators

Point-of-use gas regulation in wafer process tools requires clean, compact, and responsive pressure control, and Parker's QRM/QRMHF Series ultra-high pressure regulators deliver precise performance in a miniature, internally threadless design. Their compact footprint and low internal volume help reduce system space and support faster purging, while high-purity stainless steel construction, non-tied diaphragm design, and stable pressure control support cleanliness, responsiveness, and efficient gas stick integration. View Product

Multipurpose Hose

Parker’s multipurpose 801 Push-Lok Hose provides flexible, reliable fluid conveyance for semiconductor lithography machines, supporting auxiliary pneumatic, cooling, and utility circuits where dependable routing and simplified assembly are important. Its push-on connection design helps reduce installation time and streamline maintenance, while durable construction supports consistent performance in demanding equipment environments. The hose’s flexibility and broad application versatility help OEMs manage space-constrained layouts, improve serviceability, and maintain reliable operation across lithography machine subsystems. View Product

Nylon Tubing

Parker's Nylon Tubing provides lightweight, flexible, and reliable fluid conveyance for semiconductor lithography machines, supporting pneumatic controls, utilities, and auxiliary circuits where clean routing, space efficiency, and uptime are important. Its durability, kink resistance, and ease of installation help simplify machine assembly and maintenance in compact tool architectures. With broad chemical compatibility and dependable performance, Parker Nylon Tubing helps OEMs optimize lithography machine layouts while supporting consistent operation in cleanroom manufacturing environments. View Product