Sealing & Shielding

Parker's sealing and shielding technologies help protect sensitive processes in wafer process tools from leaks, contaminants and interference.

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Custom Molded Shapes

Parker custom molded shapes and seals are engineered for the unique sealing demands of semiconductor machine tools. Tailored to specific geometries and operating conditions, they help protect process purity, improve reliability, and support consistent equipment performance. View Product

Extruded & Spliced Seals

Parker extruded and spliced FFKM and HiFluor seals provide durable sealing for semiconductor machine tools with complex equipment layouts. Designed for chemical resistance and long service life, they help maintain system integrity and support uptime in critical manufacturing processes. View Product

EMI Shielding Gaskets

The Parker Chomerics electromagnetic interference (EMI) shielding and radio frequency interference (RFI) shielding product family spans a wide variety of uses and applications. Improve the safety and performance of electronic devices with an extensive selection of EMI gaskets, shielded windows, shielded honeycomb air vents, cable shielding products, grounding solutions, shielding laminates, and metal foil tapes. View Product

O-Rings

Parker FFKM and HiFluor O-rings support reliable sealing in semiconductor machine tools, where chemical exposure, heat, and cleanliness are critical. They help prevent leaks, reduce contamination risk, and maintain performance in demanding wafer processing environments. View Product