Fluid Conveyance

Fluid conveyance products support controlled movement of chemicals, rinse water and process fluids.

Ultra-High Purity Fluoropolymer Valves

Wet bench equipment in semiconductor cleanroom and wafer processing applications requires corrosion-resistant chemical control, and Parker's 22 Series UHP PFA Valves provide reliable isolation and flow management for concentrated acids, bases, high-purity water, and other aggressive chemistries. High-purity PFA and PTFE wetted materials help preserve media cleanliness, while manual and pneumatic configurations support flexible chemical-delivery layouts and dependable process performance. View Product

Ultra-High Purity PTFE Pressure Regulators

Wet bench chemical and UPW delivery requires clean, corrosion-resistant pressure control, and Parker's PR-1 Series Ultra-High purity PTFE pressure regulators provide stable downstream pressure reduction for high-purity and aggressive fluids. By isolating adjustment components from the process media, they help preserve cleanliness and material compatibility. Their compact quarter-inch design supports controlled fluid delivery, efficient integration, and reliable wafer processing performance. View Product

Ultra-High Purity PTFE Back-Pressure Regulators

Recirculating wet-bench and chemical-delivery loops require stable upstream pressure control, and Parker's BR-1 Series Ultra-High purity PTFE back-pressure regulators help maintain controlled pressure in high-purity chemical and water circuits. PTFE wetted construction provides corrosion resistance for aggressive media, while the compact quarter-inch design supports efficient integration, process-fluid purity, and reliable performance in semiconductor cleanroom and wafer processing applications. View Product

Ultra-High Purity Fluoropolymer Tube Fittings

Clean, removable connections are critical in semiconductor wet bench equipment, and Parker's Parflare Series PFA fittings provide high-purity connection solutions for corrosive chemical and UPW tubing. Their flared-tube design tolerates vibration and side loading while maintaining low internal dead volume. Multiple sizes and configurations support efficient routing, easier maintenance, reliable leak integrity, and process-fluid cleanliness in cleanroom and wafer processing applications. View Product

Compression Tube Fittings

Efficient wet-bench installation starts with clean, corrosion-resistant tubing connections, and Parker's Pargrip Series compression tube fittings provide high-purity PFA performance for semiconductor wafer processing equipment. The compression-style design eliminates a separate tube-flaring step, simplifying installation and service while supporting efficient fluid routing in compact systems. As a complement to Parflare, Pargrip offers flexibility where connection method, space, or maintenance preferences differ. View Product

High Abrasion Resistant PTFE Hose

Durable chemical transfer is essential inside semiconductor process tools where cleanliness, reliability, and flow consistency matter. Parker's 919HU High Abrasion Resistant PTFE Hose delivers exceptional abrasion resistance, broad chemical compatibility, and temperature capability up to 275°F. Its PTFE core resists moisture and provides an extremely low coefficient of friction, helping minimize pressure drops, reduce deposits, and support reliable chemical transfer in demanding tool environments. View Product

PFA DI Water Spray Guns

Point-of-use DI water rinsing is essential in semiconductor wet-bench processing, and Parker's SG-1 Series PFA DI Water Spray Guns provide clean, controlled rinsing for wafers and equipment. Corrosion-resistant wetted materials help protect fluid purity, while Parflare or threaded connection options and available coiled hoses support flexible installation, operator convenience, and dependable water delivery in high-purity cleanroom environments requiring consistent cleanliness and precise fluid handling control. View Product